JPH082603Y2 - Ｘ線分析装置 - Google Patents
Ｘ線分析装置Info
- Publication number
- JPH082603Y2 JPH082603Y2 JP1989032369U JP3236989U JPH082603Y2 JP H082603 Y2 JPH082603 Y2 JP H082603Y2 JP 1989032369 U JP1989032369 U JP 1989032369U JP 3236989 U JP3236989 U JP 3236989U JP H082603 Y2 JPH082603 Y2 JP H082603Y2
- Authority
- JP
- Japan
- Prior art keywords
- ray
- sample
- rays
- electron beam
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000002441 X-ray diffraction Methods 0.000 claims description 22
- 238000010894 electron beam technology Methods 0.000 claims description 17
- 230000001133 acceleration Effects 0.000 claims description 6
- 230000005284 excitation Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 230000005461 Bremsstrahlung Effects 0.000 description 3
- 238000000921 elemental analysis Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989032369U JPH082603Y2 (ja) | 1989-03-22 | 1989-03-22 | Ｘ線分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989032369U JPH082603Y2 (ja) | 1989-03-22 | 1989-03-22 | Ｘ線分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02124537U JPH02124537U (en]) | 1990-10-15 |
| JPH082603Y2 true JPH082603Y2 (ja) | 1996-01-29 |
Family
ID=31535334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989032369U Expired - Fee Related JPH082603Y2 (ja) | 1989-03-22 | 1989-03-22 | Ｘ線分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH082603Y2 (en]) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5111955A (en) * | 1974-07-17 | 1976-01-30 | Toyo Boseki | Bosekishino fumenhatsuseidohyokahoho |
| JPS6378056A (ja) * | 1986-09-20 | 1988-04-08 | Rigaku Denki Kogyo Kk | 全反射蛍光ｘ線分析装置 |
-
1989
- 1989-03-22 JP JP1989032369U patent/JPH082603Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02124537U (en]) | 1990-10-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |